Non-contact 3D Profilometer

Optical Comb 3D Profilometer




Optical Comb 3D Profilometer

Optical comb 3D Profilometer

*Z-axis stage is optional.

High speed 3D shape measurements in 1μm accuracy


■Specifications

  • High accuracy 1μm (Z direction)
  • Area range
    ~30mmx30mmx(Hight+/-10mm)
    depends on head specs
  • High resolution 60μm(XY), 0.01μm(Z)
  • High speed <2s
  • Non-contact, Non-destructive

■Applications

 

●Measurement Examples
Pits on a thin iron plate
500 yen coin
Surface figure on a gold medal


●PDFDownload
Optical Comb 3D Profilometer


 

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